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 MMC-series MMC-100 / 110
 Integrated controller / driver for PI miCos stick-slip piezo
Compact, modular design
Configurable as a standalone unit or stackab. up to 99
Open-loop / closed-loop operation
Open-loop resolution of less than 1 nm
Closed-loop resolution dependent on the encoder..
A quad B differenntial encoder feedback |
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DeltaTau-series Geobrick / Clipper
4 or 8 axes of simultaneous control (0.1 ms update t.)
80 MHz CPU optional 240 MHz
Ethernet TCP/IP, USB and RS-232 communic. interf.
Multitasking of up to 256 motion & 64 asynchronous..
Easy-to-use, high-level programming language
Linear, circular, rapid, B-spline, Hermite-spline interp.
True S-curve accel/decel for jerk-limited profiles |
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Hexapod HP-550
Six axes Parallel Kinematic System
Travel ranges linear ( XYZ ) 100x100x100 mm
Travel ranges rotation Rx, Ry 40°, Rz 60°
Maximum speed 1 mm/sec
High stiffness
Random Definition of the Pivot Point
Load capacity central ( vertical / Fz ) 50 kg
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Hexapod HP-140
Six axes Parallel Kinematic System
Travel ranges linear 32 x 32 x 12 mm
Travel ranges rotation Rx, Ry 12°, Rz 20°
Maximum speed 1 mm/sec
Pivot Point can be set by the customer
User friendly software
Load capacity central ( Fx; Fy ) 2kg / ( Fz ) 5 kg
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Micro Pusher MP-20 B
Travel range up to 76 mm (3")
Uni directional repeatability down to 0.3 µm
Max. speed 10 mm/sec
Force 125 N
Integrated limit switches (hall) |
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Ultra Precision Elevation Stage UPL-120
Travel range 13 mm (1/2")
Uni-directional repeatability down to 0.05 µm
Maximum speed 6 mm/sec
Load capacity up to 15 kg
Integrated optical limit switches
Option: linear scale (center mounted) |
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Ultra Precision Rotation St. UPR-120 AIR
High-precision air bearings
Torque motor
Uni-directional repeatability down to 0.00005°
Flatness and eccentricity ± 0.1µm
Wobble ± 1.25 µrad
Maximum speed 360 °/sec
Integrated optical reference switch
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Ultra Precision Rotation St. UPR-120 AIR
High-precision air bearings
Torque motor
Uni-directional repeatability down to 0.00005°
Flatness and eccentricity ± 0.1 µm
Wobble ± 1.25 µrad
Maximum speed 360 °/sec
Integrated optical reference switch
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Linear Piezo Stage LPS-65
Piezo driven inertia motor
Travel range up to 52 mm (2")
Uni-directional repeatability down to 0.025 µm
Maximum speed 10 mm/sec
Load capacity up to 1 kg
Encoder resolution 5 nm
Integrated linear scale
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Piezo Positioner PP-20
Travel range of up to 11 mm
Load capacity up to 1 kg
1 nm resolution
Steel ball bearing
Low profile, 7 mm stage height
Vacuum versions available
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Piezo Positioner PP-22
Travel range of up to 12 mm
Load capacity up to 1 kg
Low profile, 10 mm stage height
Two steel ball bearings
Available with a linear encoder down to 5 nm
resolution (1.2 nm upon request)
Vacuum versions available
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Precision Piezo Stage PPS-20
Travel range of up to 51 mm
1 nm resolution
Load capacity up to 2 kg
Steel cross-roller bearing
Low profile, 13 mm stage height
Vacuum, cryo and non-magnetic versions available
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Precision Piezo Stage PPS-28
Travel range of up to 102 mm
1 nm resolution
Load capacity up to 5 kg
Steel cross-roller bearing
Low profile, 15 mm stage height
Vacuum, cryo and non-magnetic versions available |
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Piezo Positioner Cross Stage PPX-32
Travel range of 18 mm x 18 mm
Load capacity up to 1 kg
Low profile, 14 mm stage height
Steel ball bearings
Available with linear encoders down to 5 nm
resolution
Vacuum versions available
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Piezo Rotation Stage PR-32
Continuous 360° motion
Load capacity up to 1kg
Steel ball bearings
Vacuum versions available
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