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ProductspfadMOTION CONTROLpfadLinear Stages
Linear Stages

Precision Linear Translation Stages The PI family (PI and PI miCos) offers an unusually broad line of high resolution linear positioning systems.  From cost-effective stepper-motor stages to high-speed linear motor stages to industry-leading nanopositioning stages, our linear-positioning products are mission-critical in a host of industrial and research applications around the globe.  Single-axis stages, vertical stages and integrated XY-stages are offered.  Applications include semiconductor manufacturing, research and industrial biotech instrumentation, materials science, aerospace, beam line instrumentation and opto-mechanical equipment. 

Product-line highlights include:

  • Low-cost, industrial-class stepper-motor stages ideal for embedded OEM applications.
  • Ultra-precision magnetic linear motor stages with recirculating-ball or crossed-roller bearings and integrated cable management, capable of speeds to 600mm/sec, travels to 500mm (20 inch) and resolutions to 1 nanometer;
  • Cost-effective, direct-drive magnetic linear motor stages offering 100nm minimum incremental motion for tough budgetary situations;
  • A range of novel ultra-compact piezomotor-driven stages with nanometer precision, long travel ranges and velocity to 400mm/sec speed;

The breadth and depth of our catalog linear-positioning stage offering together with extensive custom capabilities for specialized, industrial-class solutions means optimal performance and budget-friendly costs.  Systems are also offered for challenging environments including vacuum, EUV, non-magnetic and cryogenic.

Z-Positioners / Elevation Stages / Vertical Linear Stages The PI family (PI and PI miCos) offers a range of innovative vertical motorized positioning stages.  From cost-effective open-loop stepper-motor motor units, to high-performance lift stages with direct-reading linear encoders, to single- and multi-axis piezo nanopositioning solutions, our vertical-positioning products are mission-critical in a host of industrial and research applications around the world. 

Applications include semiconductor manufacturing, research and industrial biotech instrumentation, robotics, aerospace and beam line instrumentation. The design of a precision mechanical vertical positioner differs significantly from the design of a linear translation stage in order to reduce tilt and wobble and provide excellent position stability. Customers benefit from PI miCos’ extensive design, manufacturing and assembly experience in both fields. The breadth and depth of our standard vertical-positioning equipment—together with extensive custom capabilities for specialized, industrial-class solutions—means optimal performance and budget-friendly costs.  Our opto-mechanical equipment is also offered for challenging environments including vacuum, EUV, non-magnetic and cryogenic.

For your better guidance on our website, we splitted the group motorized Linear Stages in the following subgroups. The following subgroups you will find here ..

 

  • Home


  • Vacuum
    subgroup

  • Ultra
    subgroup

  • Precision
    subgroup

  • Micro
    subgroup

  • Eco
    subgroup

  • Vertical
    subgroup
UPS-150
Ultra Precision Linear Motor Stage UPS-150
UPM-160
Ultra Precision Linear Stage UPM-160
HPS-170
High Precision Stage HPS-170
LS-270
Linear Stage LS-270
LMS-230
Linear Motor Stage LMS-230
LMS-180
Linear Motor Stage LMS-180
LS-180
Linear Stage LS-180
LS-120
Linear Stage LS-120
LS-110
Linear Stage LS-110
LMS-80
Linear Motor Stage LMS-80
LMS-60
Linear Motor Stage LMS-60
PLS-85
Precision Linear Stage PLS-85
LS-65
Linear Stage LS-65
MTS-65
Micro Stage MTS-65
MTS-70
Micro Stage MTS-70
VT-75
Translation Stage VT-75
VT-80
Translation Stage VT-80
 LS-40
Linear Stage LS-40
NPE-200 
Nano Precision Elevation Stage NPE-200
UPL-120
Ultra Precision Lifting Stage UPL-120
ES-100
Elevation Stage ES-100
     
Ultra Precision Linear Stage UPM-160 Vacuum
navUltra Precision Linear Stage UPM-160 Vacuum

navVacuum up to 10-9 hPa
navTravel range up to 205 mm (8")
navUni-directional repeatability down to 0.035 µm
navMaximum speed 6 mm/sec
navLoad capacity up to 35 kg
navIntegrated limit switches
navIntegrated linear scale (center mounted)
High Precision Stage HPS-170 Vacuum
navHigh Precision Stage HPS-170 Vacuum

navVacuum up to 10-9 hPa
navTravel range up to 305 mm (12")
navUni-directional repeatability down to 0.05 µm
navMaximum speed 10 mm/sec
navLoad capacity up to 35 kg
navIntegrated limit switches
navOption: linear scale (center mounted)
Linear Stage LS-270 Vacuum
navLinear Stage LS-270 Vacuum

navVacuum up to 10-9 hPa
navTravel range up to 1016 mm (40")
navUni-directional repeatability down to 0.05 µm
navMaximum speed 15 mm/sec
navLoad capacity up to 150 kg
navIntegrated limit switches
navOption: linear scale (center mounted)
Linear Stage LS-180 Vacuum
navLinear Stage LS-180 Vacuum

navVacuum up 10-9 hPa
navTravel range up to 610 mm (24")
navUni-directional repeatability down to 0.05 µm
navMaximum speed 25 mm/sec
navLoad capacity up to 100 kg
navIntegrated inductive limit switches
navOption: linear scale (center mounted)
Linear Stage LS-120 Vacuum
navLinear Stage LS-120 Vacuum

navVacuum up to 10-9 hPa
navTravel range up to 40 mm (xy setup by PI miCos)
navMaximum speed 15 mm/sec
navLoad capacity up to 10 kg
navIntegrated limit switches
navOption: linear scale (center mounted)
Linear Stage LS-110 Vacuum
navLinear Stage LS-110 Vacuum

navVacuum upt 10-9 hPa
navTravel range up to 508 mm (20")
navUni-directional repeatability down to 0.05 µm
navMaximum speed15 mm/sec
navLoad capacity up to 10 kg
navIntegrated mechanical limit switches
navOption: linear scale (center mounted)
Precision Linear Stage PLS-85 Vacuum
navPrecision Linear Stage PLS-85 Vacuum

navVacuum up to 10-9 hPa
navTravel range up to 155 mm (6")
navUni-directional repeatability down to 0.05 µm
navMaximum speed 6 mm/sec
navLoad capacity up to 8 kg
navIntegrated switches
navOption: linear scale
Linear Stage LS-65 Vacuum
navLinear Stage LS-65 Vacuum

navVacuum upt 10-9 hPa
navTravel range up to 102 mm (4")
navUni-directional repeatability down to 0.3 µm
navMaximum speed 4 mm/sec
navLoad capacity up to 6 kg
navIntegrated limit switches
navOptionally higher resolution / 0.4 mm pitch
navOptionally higher repeatability & speed with ballscrew
Micro Stage MTS-65 Vacuum
navMicro Stage MTS-65 Vacuum

navVacuum up to 10-9 hPa
navTravel range up to 52 mm (2")
navUni-directional repeatability down to 0.1 µm
navMaximum speed 2.5 mm/sec
navLoad capacity up to 1 kg
navIntegrated limit switches
navOption: linear scale
Micro Stage MTS-70 XY Vacuum
navMicro Stage MTS-70 Vacuum

navVacuum up to 10-9 hPa
navTravel range 10 mm
navUni-directional repeatability down to 0.1 µm
navMaximum speed 3 mm/sec
navLoad capacity up to 1 kg
navIntegrated limit switches
navOption: linear scale
Translation Stage VT-80 Vacuum
navTranslation Stage VT-80 Vacuum

navVacuum up to 10-9 hPa
navTravel range up to 300 mm
navUni-directional repeatability down to 0.4 µm
navMaximum speed 4 mm/sec
navLoad capacity up to 5 kg
navIntegrated limit switches
Linear Stage LS-40 Vacuum
navLinear Stage LS-40 Vacuum

navVacuum up to 10-9 hPa
navTravel range up to 52 mm
navUni-directional repeatability down to 0.1 µm
navMaximum speed 0.13 mm/sec
navLoad capacity up to 2 kg
navIntegrated limit switches
navOptionally higher quality with ballscrew
Nano Precision Elevation Stage NPE-200 Vacuum
navNano Precision Elevation Stage NPE-200 Vac.

navVacuum up tp 10-9 hPa
navTravel range 13 mm (1/2")
navUni-directional repeatability down to 0.04 µm
navMaximum speed 0.06 mm/sec / higher on request
navLoad capacity up to 30 kg
navIntegrated limit switches
navIntegrated linear scale (center mounted)
Ultra Prcision Elevation Stage UPL-120 Vacuum
navUltra Prcision Elevation Stage UPL-120 Vacuum

navVacuum up to 10-9 hPa
navTravel range 13 mm (1/2")
navUni-directional repeatability down to 0.05 µm
navMaximum speed 2 mm/sec
navLoad capacity up to 15 kg
navIntegrated limit switches
navOption: linear scale (center mounted)
Elevation Stage ES-100 Vacuum
navElevation Stage ES-100 Vacuum

navVacuum up to 10-6 hPa
navTravel range up to 26 mm (1")
navUni-directional repeatability down to 0.05 µm
navMaximum speed 6 mm/sec
navLoad capacity up to 5.5 kg
navIntegrated limit switches
navOption: linear scale (center mounted)
Ultra Precision Linear Motor Stage UPS-150
navUltra Precision Linear Motor Stage UPS-150

navLinear Motor
navTravel range up to 305 mm (12")
navUni-directional repeatability down to ± 0.015 µm
navMaximum speed 600 mm/sec
navLoad capacity up to 15 kg
navIntegrated limit switches
navIntegrated linear scale (center mounted)
navHigh long-term stability
Ultra Precision Linear Stage UPM-160
navUltra Precision Linear Stage UPM-160

navTravel range up to 205 mm (8")
navUni-directional repeatability down to ± 0.02 µm
navMaximum speed 100 mm/sec
navLoad capacity up to 35 kg
navLoad capacity up to 35 kg
navIntegrated linear scale (center mounted)

Linear Motor Stage LMS-230
navLinear Motor Stage LMS-230

navTravel range up to xx mm (x")
navUni-directional repeatability down to ± 0.0x µm
navMaximum speed x00 mm/sec
navLoad capacity up to xx kg
navLoad capacity up to xx kg
navIntegrated linear scale (center mounted)

Nano Precision Elevation Stage NPE-200
navNano Precision Elevation Stage NPE-200

navTravel range 13 mm (1/2")
navUni-directional repeatability down to ± 0.025 µm
navMaximum speed 0.2 mm/sec
navLoad capacity up to 30 kg
navIntegrated limit switches
navIntegrated linear scale (center mounted)

Ultra Precision Lifting Stage UPL-120
navUltra Precision Elevation Stage UPL-120

navTravel range 13 mm (1/2")
navUni-directional repeatability down to 0.05 µm
navMaximum speed 6 mm/sec
navLoad capacity up to 15 kg
navIntegrated optical limit switches

navOption: linear scale (center mounted)
High Precision Stage HPS-170


navHigh Precision Stage HPS-170

navTravel range up to 305 mm (12")
navUni-directional repeatability down to ± 0.05 µm
navMaximum speed 90 mm/sec
navLoad capacity up to 35 kg
nav
Integrated limit switches
navOptionally: linear scale (center mounted)

Linear Stage LS-270
navLinear Stage LS-270

navTravel range up to 1016 mm (40")
navUni-directional repeatability down to ± 0.05 µm
navMaximum speed 150 mm/sec
navLoad capacity up to 150 kg
navIntegrated inductive limit switches
navOptionally: linear scale (center mounted)

Linear Motor Stage LMS-180
navLinear Motor Stage LMS-180

navLinear Motor
navTravel range up to 508 mm (20")
navUni-directional repeatability down to ± 0.03 µm
navMaximum speed 500 mm/sec
navLoad capacity up to 45 kg
navIntegrated limit switches
navIntegrated linear scale (center mounted)

Linear Stage LS-180
navLinear Stage LS-180

navTravel range up to 508 mm (20")
navUni-directional repeatability down to ± 0.05 µm
navMaximum speed 200 mm/sec
navLoad capacity up to 100 kg
navIntegrated limit switches
navOptionally: linear scale (center mounted)

Linear Stage LS-120
navLinear Stage LS-120

navTravel range 40 mm (1.5")
navUni-directional repeatability down to ± 0.05 µm
navMaximum speed 90 mm/sec
navLoad capacity up to 10 kg
navIntegrated limit switches
navOptionally: linear scale (center mounted)

Linear Stage LS-110
navLinear Stage LS-110

navTravel range up to 305 mm (12")
navUni-directional repeatability down to ± 0.05 µm
navMaximum speed 90 mm/sec
navLoad capacity up to 10 kg
navIntegrated limit switches
navOptionally: linear scale (center mounted)

Precision Linear Stage PLS-85
navPrecision Linear Stage PLS-85

navTravel range up to 155 mm (6")
navUni-directional repeatability down to ± 0.05 µm
navMaximum speed 100 mm/sec
navLoad capacity up to 10 kg
navIntegrated limit switches
navOptionally: linear scale

Micro Stage MTS-65
navMicro Stage MTS-65

navTravel range up to 52 mm (2")
navUni-directional repeatability down to ± 0.1 µm
navMaximum speed 8 mm/sec
navLoad capacity up to 2 kg
navIntegrated limit switches
navOptionally: linear scale

Micro Stage MTS-70
navMicro Stage MTS-70

navTravel range 8 mm
navUni-directional repeatability down to ± 0.1 µm
navMaximum speed 7 mm/sec
navLoad capacity up to 2 kg
navIntegrated limit switches
navOptionally: linear scale

Linear Stage LS-40


navLinear Stage LS-40

navTravel range up to 52 mm
navUni-directional repeatability down to ± 0.1 µm
navMaximum speed 5 mm/sec

navLoad capacity up to 2 kg
navIntegrated hall / mechanical / optical limit switches
navOptionally higher quality with ballscrew

Translation Stage VT-75
navLinear Stage VT-75

navTravel range up to 600 mm
navUni-directional repeatability down to ± 0.4 µm
navMaximum speed 150 mm/sec
navLoad capacity up to 5 kg
navIntegrated limit switches
Translation Stage VT-80
navTranslation Stage VT-80

navTravel range up to 300 mm
navUni-directional repeatability down to ± 0.2 µm
navMaximum speed 20 mm/sec
navLoad capacity up to 5 kg
navIntegrated limit switches

Linear Stage LS-65
navLinear Stage LS-65

navTravel range up to 102 mm (4")
navUni-directional repeatability down to ± 0.2 µm
navMaximum speed 10 mm/sec
navLoad capacity up to 2 kg
navIntegrated limit switches
navOptionally 0.4 mm pitch

Linear Motor Stage LMS-80
navLinear Motor Stage LMS-80

navLinear Motor
navTravel range 120 mm
navUni-directional repeatability down to ± 0.03 µm
navMaximum speed 500 mm/sec
navLoad capacity up to 5 kg
navIntegrated limit switches
navIntegrated linear scale

Linear Motor Stage LMS-60
navLinear Motor Stage LMS-60
navLinear Motor
navTravel range up to 65 mm
navUni-directional repeatability down to ± 0.03 µm
navMaximum speed 500 mm/sec
navLoad capacity up to 3 kg
navIntegrated limit switches
navIntegrated linear scale

Nano Precision Elevation Stage NPE-200
navNano Precision Elevation Stage NPE-200

navTravel range 13 mm (1/2")
navUni-directional repeatability down to ± 0.025 µm
navMaximum speed 0.2 mm/sec
navLoad capacity up to 30 kg
navIntegrated limit switches
navIntegrated linear scale (center mounted)

Ultra Precision Lifting Stage UPL-120
navUltra Precision Elevation Stage UPL-120

navTravel range 13 mm (1/2")
navUni-directional repeatability down to 0.05 µm
navMaximum speed 6 mm/sec
navLoad capacity up to 15 kg
navIntegrated optical limit switches

navOption: linear scale (center mounted)
Elevation Stage ES-100
navElevation Stage ES-100

navTravel range up to 26 mm (1")
navUni-directional repeatability down to ± 0.05 µm
navMaximum speed 20 mm/sec
navLoad capacity up to 5.5 kg
navIntegrated limit switches
navOptionally: linear scale (center mounted)
navHigher load on request

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