PI miCos GmbH - Linear Stages

UPS-150

UPM-160

HPS-170

LS-270

LMS-300

LMS-230

LMS-180

LS-180

LMS-120

LS-120

LS-110

LMS-100

LMS-80

LMS-60

PLS-85

LS-65

MTS-65

MTS-70

VT-75

VT-40

VT-80

LS-40

VT-21 L

VT-21 S

MT-55

CS-430

MS-8

MS-4

KT-120

MS-bio

NPE-200

UPL-160

UPL-120

ES-100

ES-82

ES-70

ES-65

ES-50

MA-35

MP-20

MP-20 B

MP-20 L

MP-20 S

MP-21

MP-15

ASS 5E

Almost all PI miCos stages can be prepared for FV, HV and UHV. For UHV vacuum class all components are made for 10-9 mbar. Special UHV motors, cables controlers, greases and coatings are used.


UHV Reference Model PLS-85	UHV [HV] Technical key feaures
	Travel range up to 155 mm (6") Uni-directional repeatability down to ± 0.05 µm Maximum speed 8 [15] mm/sec Maximum speed 4 mm/sec [UHV - no lubrication] Load capacity up to 6 [7] kg Limit & Reference switches in ceramic-gold [UHV] Limit & Reference switches in platic [HV] Optionally Optical Linear Encoder vacuum type Accessories D-type Connectors & Feedthroughs

classification of the vacuum classes*

Low vacuum	FV	-20°C ... +150°C	<1 - 1x 10^-3 mbar
High vacuum	HV	-20°C ... +210°C	<1x 10^-3 - 1x 10^-7 mbar
Ultra-high vacuum	UHV	-20°C ... +210°C	<1x 10^-7 - 1x 10^-9 mbar
Ultra-high vacuum Grease	UHV-G	-20°C ... +210°C	< 10^-9 mbar
Ultra-high vacuum Cryo	UHV-C	-269°C ... +40°C	up to 10^-11 mbar
Extreme-ultra-high vacuum	E-UHV	-20°C ... +210°C	<1x 10^-9 - 1x 10^-11 mbar

* the values refer to the vacuum motors ready to use
classification of the vacuum classes gerneral terms

Measurement data fig. The PI miCos vacuum chamber is equipped with a fan heater. By heating up the chamber while pumping, the outgasing of products like stages or pushers is highly accelerated. This allows to reach vacuum values of 10-9 mbar and beyond in a reasonable pumping time. The maximal possible outgasing temperature often depends on components like polymere sealings or soft solder. PI miCos avoids these components in her products whenever possible.
The graph below shows a typical test cycle of pumping down, heating up for outgasing and cooling down to reach the 10-9 mbar range. At several positions at this cycle mass spectra are taken to analyze the residual gas composition.

Other examples:

	Ultra Precision Linear Stage UPM-160 UHV Travel range up to 205 mm (8") Uni-directional repeatability down to ± 0.02 µm Maximum speed 100 mm/sec Load capacity up to 35 kg Load capacity up to 35 kg Integrated linear scale (center mounted)
	Linear Stage LS-180 UHV Travel range up to 508 mm (20") Uni-directional repeatability down to ± 0.05 µm Maximum speed 200 mm/sec Load capacity up to 100 kg Integrated limit switches Optionally: linear scale (center mounted)
	Linear Stage LS-110 UHV Travel range up to 305 mm (12") Uni-directional repeatability down to ± 0.05 µm Maximum speed 90 mm/sec Load capacity up to 10 kg Integrated limit switches Optionally: linear scale (center mounted)
	Precision Linear Stage PLS-85 HV Travel range up to 155 mm (6") Uni-directional repeatability down to ± 0.05 µm Maximum speed 100 mm/sec Load capacity up to 10 kg Integrated limit switches Optionally: linear scale
	Linear Stage MT-65 UHV Travel range up to 155 mm (6") Uni-directional repeatability down to ± 0.05 µm Maximum speed 100 mm/sec Load capacity up to 10 kg Integrated limit switches Optionally: linear scale
	Micro Stage MTS-65 HV Travel range up to 52 mm (2") Uni-directional repeatability down to ± 0.1 µm Maximum speed 8 mm/sec Load capacity up to 2 kg Integrated limit switches Optionally: linear scale
	Linear Stage VT-80 FV HV UHV Travel range up to 300 mm Uni-directional repeatability down to ± 0.2 µm Maximum speed 20 mm/sec Load capacity up to 5 kg Integrated limit switches
	Micro Pusher MP-20 L UHV Travel range up to 75 mm Uni-directional repeatability down to ± 0.5 µm Maximum speed 3.5 mm/sec Force max. 125 N Integrated limit switches High resolution Including both inserts MP-B & MP-F
	Micro Pusher MP-20 S UHV Travel range 12.5 mm Uni-directional repeatability down to ± 1 µm Maximum speed 3 mm/sec Force max. 20 N Integrated limit switches High resolution
	Translation Stage VT-21 L HV Travel range 26 mm Load capacity up to 1 kg Integrated limit switches Translation Stage VT-21 S HV Travel range 11 mm Load capacity up to 1 kg Integrated limit switches

	Ultra Precision Linear Motor Stage UPS-150 Linear Motor Travel range up to 305 mm (12") Uni-directional repeatability down to ± 0.015 µm Maximum speed 600 mm/sec Load capacity up to 15 kg Integrated limit switches Integrated linear scale (center mounted) High long-term stability
	Ultra Precision Linear Stage UPM-160 Travel range up to 205 mm (8") Uni-directional repeatability down to ± 0.02 µm Maximum speed 100 mm/sec Load capacity up to 35 kg Load capacity up to 35 kg Integrated linear scale (center mounted)
	Linear Motor Stage LMS-230 Travel range up to xx mm (x") Uni-directional repeatability down to ± 0.0x µm Maximum speed x00 mm/sec Load capacity up to xx kg Load capacity up to xx kg Integrated linear scale (center mounted)
	Nano Precision Elevation Stage NPE-200 Travel range 13 mm (1/2") Uni-directional repeatability down to ± 0.025 µm Maximum speed 0.2 mm/sec Load capacity up to 30 kg Integrated limit switches Integrated linear scale (center mounted)
	Ultra Precision Elevation Stage UPL-160 Travel range 26 mm (1") Uni-directional repeatability down to ± 0.02 µm Maximum speed 30 mm/sec Load capacity up to 30 kg Integrated limit switches Integrated linear scale (center mounted)
	Ultra Precision Elevation Stage UPL-120 Travel range 13 mm (1/2") Uni-directional repeatability down to 0.05 µm Maximum speed 6 mm/sec Load capacity up to 15 kg Integrated optical limit switches Option: linear scale (center mounted)

	Ultra Precision Stage UPS-150 Linear Motor Travel range up to 305 mm (12") Uni-directional repeatability down to ± 0.015 µm Maximum speed 600 mm/sec Load capacity up to 15 kg Integrated limit switches Integrated linear scale (center mounted) High long-term stability
	Linear Motor Stage LMS-300 Linear Motor Travel range up to 815 mm (32") Uni-directional repeatability down to ± 0.03 µm Maximum speed 800 mm/sec Load capacity up to 100 kg Integrated limit switches Integrated linear scale (center mounted)
	Linear Motor Stage LMS-230 Travel range up to xx mm (x") Uni-directional repeatability down to ± 0.0x µm Maximum speed x00 mm/sec Load capacity up to xx kg Load capacity up to xx kg Integrated linear scale (center mounted)
	Linear Motor Stage LMS-180 Linear Motor Travel range up to 508 mm (20") Uni-directional repeatability down to ± 0.03 µm Maximum speed 500 mm/sec Load capacity up to 45 kg Integrated limit switches Integrated linear scale (center mounted)
	Linear Motor Stage LMS-120 Linear Motor Travel range 40 mm Uni-directional repeatability down to ± 0.03 µm Maximum speed 200 mm/sec Load capacity up to 2.5 kg Integrated limit switches Integrated linear scale (center mounted)
	Linear Motor Stage LMS-100 Linear Motor Travel range up to 1000 mm Uni-directional repeatability down to ± 0.03 µm Maximum speed 500 mm/sec Load capacity up to 20 kg Integrated limit switches Integrated linear scale (center mounted)
	Linear Motor Stage LMS-80 Linear Motor Travel range 120 mm Uni-directional repeatability down to ± 0.03 µm Maximum speed 500 mm/sec Load capacity up to 5 kg Integrated limit switches Integrated linear scale
	Linear Motor Stage LMS-60 Linear Motor Travel range up to 65 mm Uni-directional repeatability down to ± 0.03 µm Maximum speed 500 mm/sec Load capacity up to 3 kg Integrated limit switches Integrated linear scale

	High Precision Stage HPS-170 Travel range up to 305 mm (12") Uni-directional repeatability down to ± 0.05 µm Maximum speed 90 mm/sec Load capacity up to 35 kg Integrated limit switches Optionally: linear scale (center mounted)
	Linear Stage LS-270 Travel range up to 1016 mm (40") Uni-directional repeatability down to ± 0.05 µm Maximum speed 150 mm/sec Load capacity up to 150 kg Integrated limit switches Optionally: linear scale (center mounted)
	Linear Stage LS-180 Travel range up to 508 mm (20") Uni-directional repeatability down to ± 0.05 µm Maximum speed 200 mm/sec Load capacity up to 100 kg Integrated limit switches Optionally: linear scale (center mounted)
	Linear Stage LS-120 Travel range 40 mm (1.5") Uni-directional repeatability down to ± 0.05 µm Maximum speed 90 mm/sec Load capacity up to 10 kg Integrated limit switches Optionally: linear scale (center mounted)
	Linear Stage LS-110 Travel range up to 305 mm (12") Uni-directional repeatability down to ± 0.05 µm Maximum speed 90 mm/sec Load capacity up to 10 kg Integrated limit switches Optionally: linear scale (center mounted)
	Precision Linear Stage PLS-85 Travel range up to 155 mm (6") Uni-directional repeatability down to ± 0.05 µm Maximum speed 100 mm/sec Load capacity up to 10 kg Integrated limit switches Optionally: linear scale

	Linear Stage VT-75 Travel range up to 600 mm Uni-directional repeatability down to ± 0.4 µm Maximum speed 100 mm/sec Load capacity up to 5 kg Integrated limit switches
	Linear Stage VT-40 Travel range up to 100 mm Uni-directional repeatability down to ± 0.4 µm Maximum speed 100 mm/sec Load capacity up to 1 kg Integrated limit switches
	Translation Stage VT-80 Travel range up to 300 mm Uni-directional repeatability down to ± 0.2 µm Maximum speed 20 mm/sec Load capacity up to 5 kg Integrated limit switches
	Linear Stage LS-65 Travel range up to 102 mm (4") Uni-directional repeatability down to ± 0.2 µm Maximum speed 10 mm/sec Load capacity up to 2 kg Integrated limit switches Optionally 0.4 mm pitch
	Translation Stage VT-21 L Travel range 26 mm Load capacity up to 1 kg Integrated limit switches
	Translation Stage VT-21 S Travel range 11 mm Load capacity up to 1 kg Integrated limit switches
	Elevation Stage ES-50 Travel range 10 mm Uni-directional repeatability down to 0.1 µm Maximum speed 5 mm/sec Load capacity up to 1 kg Integrated limit switches Optionally: linear scale Other resolutions and accuracies avail. up. request

	Micro Stage MTS-65 Travel range up to 52 mm (2") Uni-directional repeatability down to ± 0.1 µm Maximum speed 8 mm/sec Load capacity up to 2 kg Integrated limit switches Optionally: linear scale
	Micro Stage MTS-70 Travel range 8 mm Uni-directional repeatability down to ± 0.1 µm Maximum speed 7 mm/sec Load capacity up to 2 kg Integrated limit switches Optionally: linear scale
	Linear Stage LS-40 Travel range up to 52 mm Uni-directional repeatability down to ± 0.1 µm Maximum speed 15 mm/sec Integrated limit switches High resolution
	Translation Stage VT-21 L Travel range 26 mm Load capacity up to 1 kg Integrated limit switches
	Translation Stage VT-21 S Travel range 11 mm Load capacity up to 1 kg Integrated limit switches
	Micro Stage MT-55 Travel range 5 mm Uni-directional repeatability down to ± 0.2 µm Maximum speed 1 mm/sec Load capacity up to 0.8 kg Integrated limit switches Center hole 15 mm High Resolution

	Nano Precision Elevation Stage NPE-200 Travel range 13 mm (1/2") Uni-directional repeatability down to ± 0.025 µm Maximum speed 0.2 mm/sec Load capacity up to 30 kg Integrated limit switches Integrated linear scale (center mounted)
	Ultra Precision Lifting Stage UPL-160 Travel range 26 mm (1") Uni-directional repeatability down to ± 0.02 µm Maximum speed 30 mm/se Load capacity up to 30 kg Integrated limit switches Integrated linear scale (center mounted)
	Ultra Precision Elevation Stage UPL-120 Travel range 13 mm (1/2") Uni-directional repeatability down to 0.05 µm Maximum speed 6 mm/sec Load capacity up to 15 kg Integrated optical limit switches Option: linear scale (center mounted)
	Elevation Stage ES-100 Travel range up to 26 mm (1") Uni-directional repeatability down to ± 0.05 µm Maximum speed 20 mm/sec Load capacity up to 5.5 kg Integrated limit switches Optionally: linear scale (center mounted) Higher load on request
	Elevation Stage ES-82 Travel range 13 mm (1/2") Uni-directional repeatability down to ± 0.05 µm Maximum speed 0.1 mm/sec Load capacity up to 2 kg Integrated limit switches Optionally: linear scale
	Elevation Stage ES-70 Travel range 6.25 mm (1/4") Bi-directional repeatability down to ± 1 µm Maximum speed 0.1 mm/sec Load capacity up to 2 kg Integrated limit switches
	Elevation Stage ES-65 Travel range 26 mm (1") Uni-directional repeatability down to ± 2 µm Maximum speed 20 mm/sec Load capacity up to 2 kg Integrated limit switches Ball bearings
	Elevation Stage ES-50 Travel range 10 mm Uni-directional repeatability down to 0.1 µm Maximum speed 5 mm/sec Load capacity up to 1 kg Integrated limit switches Optionally: linear scale Other resolutions and accuracies avail. up. request
	Elevation Piezo Stage EPS-30 Travel range up to 13 mm (1/2") Uni-directional repeatability down to ± 0.05 µm Maximum speed 1 mm/sec Load capacity up to 0.15 kg Integrated linear scale (center mounted) Piezo inertia drive Encoder resolution up to 5 nm Holding force 1.5 N

	Micro Actuator MA-35 Travel range 52 mm (2") Uni-directional repeatability down to ± 0.5 µm Maximum speed 100 mm/sec Force max. 200 N Integrated limit switches High resolution
	Micro Pusher MP-20 B Travel range up to 76 mm (3") Uni directional repeatability down to 0.3 µm Max. speed 10 mm/sec Force 125 N Integrated limit switches (hall)
	Micro Pusher MP-20 Micro puscher with 2phase stepper- or dc motor Travel range: 13, 26, 52 or 76mm Resolution 100nm and speed max. 15mm/s Force: max. 120 N Integrated limit switches High resolution Options: vacuum up to 10-9mbar and other materials
	Micro Pusher MP-20 L Travel range up to 75 mm Uni-directional repeatability down to ± 0.5 µm Maximum speed 3.5 mm/sec Force max. 125 N Integrated limit switches High resolution Including both inserts MP-B & MP-F
	Micro Pusher MP-20 S Travel range 12.5 mm Uni-directional repeatability down to ± 1 µm Maximum speed 3 mm/sec Force max. 20 N Integrated limit switches High resolution
	Micro Pusher MP-21 Travel range up to 25 mm Uni-directional repeatability down to ± 0.2 µm Force max. 40 N Integrated limit switch Other resolutions and travel lengths available upon request
	Micro Pusher MP-15 Travel range up to 12.7 mm Uni-directional repeatability down to ± 2 µm Maximum speed 0.16 mm/sec Force max. 10 N Integrated limit switches a choice of different interfaces like M6

	Cross Stage CS-430 Travel range 350x300 mm Uni-directional repeatability down to ± 0.1 µm Maximum speed 100 mm/sec Load capacity up to 30 kg Integrated limit switches Optionally: linear scale (center mounted)
	Scan Table MS-8 Travel range 205 mm (8") x 205 mm (8") Uni-directional repeatability down to ± 0.25 µm Maximum speed 60 mm/sec Load capacity up to 4 kg Integrated limit switches Optionally: linear scale Clear aperture 205 x 205 mm
	Scan Table MS-4 Travel range 102 mm (4") x 76 mm (3") Uni-directional repeatability down to ± 0.25 µm Maximum speed 90 mm/sec Load capacity up to 3 kg Integrated limit switches Optionally: linear scale Clear aperture 100 mm
	Scan Table KT-120 Travel range 26 mm (1") x 26 mm (1") Uni-directional repeatability down to ± 2 µm Maximum speed 3.5 mm/sec Load capacity up to 5 kg Integrated limit switches Clear aperture 45 mm
	Microscope Stage MS-bio Absolute Positioning in XY with linear motor Travel range: 80x55 mm Resolution < 50 nm with repeatability <1 µm Sped max. up to 1000 mm/s with 10 m/s2 Ultracompact design incl. absolute scale & controller The following is included: MS-bio, Controller, Manual and Software