PI miCos GmbH - Ultra Precision Linear Stage UPM-160

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Ultra Precision Linear Stage UPM-160

DESCRIPTIOn

The Ultra Precision Linear Stage UPM-160 was specifically designed for wafer inspection, fiber alignment or for any other tasks where a maximum of positioning accuracy and reliability is absolutely mandatory. learn more...

All UPM-160 stages are equipped with an integrated linear scale that is center mounted between the guides. High-quality cross-roller bearings mounted on a stress-relieved, tempered aluminum-alloy body guarantee maximum load capacity and smooth motion. UPM-160 stages are offered with a 2-phase stepper motor or with a DC-motor and are equipped with two mechanical limit switches. All ultra precision linear stages are supplied with a certificate of performance (flatness, straightness & accuracy).

Definitions

		Extended Warranty
		Vaccum Option
		Linear or Rotation Feedback

Key features

Travel range up to 205 mm (8")

Uni-directional repeatability down to 0.035 µm

Maximum speed 100 mm/sec

Load capacity up to 35 kg

Integrated limit switches

Integrated linear scale (center mounted)

Facts

Load Characteristics	Fx (N)	Fy (N)	Fz (N)	Mx (Nm)	My (Nm)	Mz (Nm)	kax (µrad/Nm)	kay (µrad/Nm)
DC-B-039	150	100	350	100	200	100	5	3
2Phase-051	150	100	350	100	200	100	5	3

TECHNICAL DATA

Travel range (mm)	55	105	155	205
Straightness / Flatness (µm)	± 0.5	± 0.75	± 1	± 1.25
Pitch (µrad)	± 15	± 20	± 25	± 30
Yaw (µrad)	± 20	± 20	± 20	± 20
Weight (kg)	5	6	7	8

Motor (Pitch 2.5\|5 mm)	DC-B-039	2Phase-051
Linear scale			LS-010	LS-020
Speed max. (mm/sec)	50 \| 100	18 \| 30
Resolution calculated (µm)		5 \| 10 (FS)	0.05	0.001
Resolution typical (µm)			0.04	0.02
Bi-directional Repeatability (µm)			± 0.05	± 0.035
Uni-directional Repeatability (µm)			0.05	0.035
Nominal Current (A)	3.8	2.5
Voltage Range (V)	24
Accuracy	on request
Velocity Range (mm/sec)	0.001 ... 100
Material	Aluminium, black anodized


Note: More info:	FS = full step, RE = rotary encoder Detailed info, concerning the motors and encoders, see: Appendix...

MOTOR SIZE
DRAWING INFO
ORDERING INFO & DETAILS ON REQUEST



DC-B-039	2Phase-051



Travel range (mm)	55	105	155	205
A (mm)	110	135	160	185
B (mm)	210	260	310	360
C (mm)	6	8	10	12
D (mm)	-	4	4	6
E (mm)	3	3	5	5

Please fill in all fields marked with *

Order no.:

* 6270-9-

Motor:

DC-B-039

2Phase-051

Travel range:

52 mm (2")

105 mm (4")

155 mm (6")

205 mm (8")

Encoder:

LS-011, Linear steel scale

LS-020, Linear glass scale

Spindle pitch:

2.5 mm

5.0 mm


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