high-resolution micro-stepping, the gear-less stages utilize re-circulating ball bearings and a ground re-circulating ball screw. As a result, maximum of stiffness, accuracy and smoothness of  motion is guaranteed. The micro stage is equipped with two optical or hall limit switches. For higher positioning accuracy and repeatability 0.1 µm, the micro stages MTS-65 are offered with a linear scale. Using a special mounting kit, MTS-65 stages can be assembled to XY or XYZ- modules.

Definitions

Vaccum Option   Linear or Rotation Feedback