PI miCos GmbH - Ultra Precision Elevation Stage UPL-120

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Ultra Precision Elevation Stage UPL-120

DESCRIPTIOn

The UPL-120 ultra-precision elevation stage replaces our older UPL-160 stage. It was specifically designed for wafer inspection, fiber alignment and any other task where maximum positioning accuracy and reliability are absolutely mandatory. learn more...

The UPL-120 stage can be equipped with an integrated linear scale. High-quality cross roller bearings mounted on a stress-relieved tempered aluminum alloy body guarantee a maximum load capacity and smooth motion. The UPL-120 stage is offered with a 2-phase SM motor or with a DC-motor and is equipped with two optical limit switches.

Definitions

		New product
		Cryogenic Option
		Vaccum Option
		Linear or Rotation Feedback

Key features

Travel range 13 mm (1/2")

Uni-directional repeatability down to 0.05 μm

Maximum speed 6 mm/sec

Load capacity up to 15 kg

Integrated optical limit switches

Option: linear scale (center mounted)

Facts

Load Characteristics	Fx (N)	Fy (N)	Fz (N)	Mx (Nm)	My (Nm)	Mz (Nm)	kax (µrad/Nm)	kay (µrad/Nm)
DC-B-028	200	150	150	130	38	130	35	65
2Phase-025	200	150	200	130	38	150	35	65

TECHNICAL DATA

Travel range (mm)	13
Straightness (µm)	± 3
Pitch (µrad)	± 100
Yaw (µrad)	± 100
Weight (kg)	2.1

Motor (Pitch 2 mm)	DC-B-028	2Phase-025
Linear scale			LS-025
Speed max. (mm/sec)	6	6
Resolution calculated (µm)	0.0134	1.34 (FS)
Resolution typical (µm)	0.5	0.5	0.1
Bi-directional Repeatability (µm)	± 1.5	± 1.5	± 0.05
Uni-directional Repeatability (µm)	0.5	0.5	0.05
Nominal Current (A)	0.98	2
Voltage Range (V)	24
Accuracy	on request
Velocity Range (mm/sec)	0.001 ... 6
Material	Aluminium, black anodized


Note: More info:	FS = full step, RE = rotary encoder Detailed info, concerning the motors and encoders, see: Appendix...

MOTOR SIZE
DRAWING INFO
ORDERING INFO & DETAILS ON REQUEST



DC-B-028	2Phase-025

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Order no.:

* 6635-9-

Motor:

DC-B-039

2Phase-070

Travel range:

13 mm (1/2")

Encoder:

open loop

LS-025, Linear steel scale

Limit Switch:

OLS-010


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