PI miCos GmbH - Rotation Stages

UPR-270 AIR

UPR-270

UPR-160 AIR

UPR-160

UPR-120 AIR

UPR-120

UPR-100 AIR

UPR-100

TSR-65

PRS-200

PRS-110

DT-65 N

RS-40

DT-80

DT-80 R

DT-50

DT-34

RSP-200

WT-120

WT-90

WT-100

WT-85

TT-65

AFW-65

Almost all PI miCos stages can be prepared for FV, HV and UHV. For UHV vacuum class all components are made for 10-9 mbar. Special UHV motors, cables controlers, greases and coatings are used.


UHV Reference Model PRS-110	UHV [HV] Technical key feaures
	Uni-directional repeatability down to ± 0.0002° Maximum speed 12° [18] /sec Maximum speed 6°/sec [UHV - no lubrication] Load capacity up to 7 [8] kg Reference switches in plasitc [HV] Reference switches in ceramic-gold [UHV] Optionally Optical Angular Encoder vacuum type Accessories D-type Connectors & Feedthroughs

classification of the vacuum classes*

Low vacuum	FV	-20°C ... +150°C	<1 - 1x 10^-3 mbar
High vacuum	HV	-20°C ... +210°C	<1x 10^-3 - 1x 10^-7 mbar
Ultra-high vacuum	UHV	-20°C ... +210°C	<1x 10^-7 - 1x 10^-9 mbar
Ultra-high vacuum Grease	UHV-G	-20°C ... +210°C	< 10^-9 mbar
Ultra-high vacuum Cryo	UHV-C	-269°C ... +40°C	up to 10^-11 mbar
Extreme-ultra-high vacuum	E-UHV	-20°C ... +210°C	<1x 10^-9 - 1x 10^-11 mbar

* the values refer to the vacuum motors ready to use
classification of the vacuum classes gerneral terms

Measurement data fig. The PI miCos vacuum chamber is equipped with a fan heater. By heating up the chamber while pumping, the outgasing of products like stages or pushers is highly accelerated. This allows to reach vacuum values of 10-9 mbar and beyond in a reasonable pumping time. The maximal possible outgasing temperature often depends on components like polymere sealings or soft solder. PI miCos avoids these components in her products whenever possible.
The graph below shows a typical test cycle of pumping down, heating up for outgasing and cooling down to reach the 10-9 mbar range. At several positions at this cycle mass spectra are taken to analyze the residual gas composition.

Other examples:

	Rotation Stage DT-65 N HV Uni-directional repeatability down to ± 0.002° Maximum speed 60 °/sec Load capacity up to 3 kg Integrated reference switch Clear aperture 25 mm Preloaded worm drive for zero backlash
	Rotation Stage DT-65 N HV Uni-directional repeatability down to ± 0.002° Maximum speed 60 °/sec Load capacity up to 3 kg Integrated reference switch Clear aperture 25 mm Preloaded worm drive for zero backlash
	Rotation Stage DT-80 HV Uni-directional repeatability down to ± 0.01° Maximum speed 45°/sec Load capacity up to 2 kg Integrated reference switch Clear aperture 40 mm Travel range 360°, endless
	Precision Rotation Stage PRS-200 HV Uni-directional repeatability down to ± 7.627E-5° Maximum speed 150 °/sec Load capacity up to 50 kg Integrated reference switches Optionally: angular scale Clear aperture 120 mm Preloaded worm drive for zero backlash
	Rotation Stage RS-40 HV Uni-directional repeatability down to ± 0.005° Maximum speed 7°/sec Load capacity up to 2 kg Integrated reference switch Clear aperture 20 mm Worm gear drive Precise, smooth continuous 360° motion

	Ultra Precision Rotation Stage UPR-270 AIR Torque Motor Uni-directional repeatability down to ± 0.0001° Maximum speed 360 °/sec Load capacity up to 40 kg Integrated reference switches Integrated angular scale High precision air bearings
	Ultra Precision Rotation Stage UPR-160 AIR Torque Motor Uni-directional repeatability down to ± 0.0001 ° Maximum speed 360 °/sec Load capacity up to 20 kg Integrated reference switches Integrated angular scale High precision air bearings
	Ultra Precision Rotation St. UPR-120 AIR High-precision air bearings Torque motor Uni-directional repeatability down to 0.00005° Flatness and eccentricity ± 0.1µm Wobble ± 1.25 µrad Maximum speed 360 °/sec Integrated optical reference switch
	Ultra Precision Rotation Stage UPR-100 AIR Torque Motor Uni-directional repeatability down to ± 0.0001° Maximum speed 360 °/se Load capacity up to 1.5 kg Integrated reference switches Integrated angular scale High precision air bearings

	Ultra Precision Rotation Stage UPR-270 AIR Torque Motor Uni-directional repeatability down to ± 0.0001° Maximum speed 360 °/sec Load capacity up to 40 kg Integrated reference switches Integrated angular scale High precision air bearings
	Ultra Precision Rotation Stage UPR-270 Torque Motor Uni-directional repeatability down to ± 0.0001° Maximum speed 360 °/sec Load capacity up to 80 kg Integrated reference switches Integrated angular scale High-precision ball bearings
	Ultra Precision Rotation Stage UPR-160 AIR Torque Motor Uni-directional repeatability down to ± 0.0001° Maximum speed 360 °/sec Load capacity up to 20 kg Integrated reference switches Integrated angular scale High precision air bearings
	Ultra Precision Rotation Stage UPR-160 Torque Motor Uni-directional repeatability down to ± 0.0001° Maximum speed 360 °/sec Load capacity up to 40 kg Integrated reference switches Integrated angular scale High-precision ball bearings
	Ultra Precision Rotation St. UPR-120 AIR High-precision air bearings Torque motor Uni-directional repeatability down to 0.00005° Flatness and eccentricity ± 0.1 µm Wobble ± 1.25 µrad Maximum speed 360 °/sec Integrated optical reference switch
	Ultra Precision Rotation Stage UPR-120 High-precision air bearings Torque motor Uni-directional repeatability down to 0.00008° Flatness and eccentricity ± 3µm Wobble ± 25 µrad Maximum speed 360 °/sec Integrated optical reference switch
	Ultra Precision Rotation Stage UPR-100 AIR Torque Motor Uni-directional repeatability down to ± 0.0001° Maximum speed 360 °/sec Load capacity up to 1.5 kg Integrated reference switches Integrated angular scale High precision air bearings
	Ultra Precision Rotation Stage UPR-100 Torque Motor Uni-directional repeatability down to ± 0.0001° Maximum speed 360 °/sec Load capacity up to 3 kg Integrated reference switches Integrated angular scale High-precision ball bearings
	Torque Rotation Stage TRS-65 Torque Motor Travel range 45° Uni-directional repeatability down to ± 0.00025 ° Maximum speed 360 °/sec Load capacity up to 0.5 kg Integrated limit switches Integrated angular scale

	Precision Rotation Stage PRS-200 Uni-directional repeatability down to ± 7.627E-5° Maximum speed 150 °/sec Load capacity up to 50 kg Integrated reference switches Optionally: angular scale Clear aperture 120 mm Preloaded worm drive for zero backlash
	Precision Rotation Stage PRS-110 Uni-directional repeatability down to ± 0.0002° Maximum speed 200 °/sec Load capacity up to 10 kg Integrated reference switches Optionally: angular scale Clear aperture 35 mm Preloaded worm drive for zero backlash
	Rotation Stage DT-65 N Uni-directional repeatability down to ± 0.002° Maximum speed 60 °/sec Load capacity up to 3 kg Integrated reference switch Clear aperture 25 mm Preloaded worm drive for zero backlash

	Torque Rotation Stage TRS-65 Torque Motor Travel range 45° Uni-directional repeatability down to ± 0.00025° Maximum speed 360°/sec Load capacity up to 0.5 kg Integrated limit switches Integrated angular scale
	Rotation Stage DT-80 Uni-directional repeatability down to ± 0.01° Maximum speed 45°/sec Load capacity up to 2 kg Integrated reference switch Clear aperture 40 mm Travel range 360°, endless
	Rotation Stage DT-80 R Uni-directional repeatability down to ± 0.01° Maximum speed 1100 °/sec Load capacity up to 2 kg Integrated reference switches Clear aperture 40 mm Travel range 360°, endless
	Rotation Stage DT-50 Uni-directional repeatability down to ± 0.015° Maximum speed 4000 °/sec Load capacity up to 1 kg Integrated reference switch Clear aperture 20 mm Travel Range 360°, endless
	Rotation Stage DT-34 Maximum speed 24 °/sec load capacity up to 0.4 kg Integrated reference switch Clear aperture 12.7 mm Rotation Range 360°, endless With thread mount 1/2 inch UNC Compact design
	Rotation Stage Pollux RSP-200 Uni-directional repeatability down to ± 0.05° Maximum speed 1440°/sec Load capacity up to 2 kg Integrated reference switches Single-axis microst. motor & controller combination Stand-alone system with integ. 2-phase stepper m. Serial Interface RS-232 19200 Baud 24 VDC power supply and RS-232 cable included

	Rotation Stage RS-40 Uni-directional repeatability down to ± 0.005° Maximum speed 7°/sec Load capacity up to 2 kg Integrated reference switch Clear aperture 20 mm Worm gear drive Precise, smooth continuous 360° motion
	Rotation Stage DT-34 Maximum speed 24 °/sec load capacity up to 0.4 kg Integrated reference switch Clear aperture 12.7 mm Rotation Range 360°, endless With thread mount 1/2 inch UNC Extremely compact design

	Goniometer WT-120 Uni-directional repeatability down to ± 0.0002174° Maximum speed 60°/sec Load capacity up to 20 kg Integrated limit switches Optionally: angular scale Hardened worm gear drive Precise, smooth continuous 90° motion
	Goniometer WT-90 Uni-directional repeatability down to ± 0.0005° Maximum speed 30 °/sec Load capacity up to 8 kg Integrated limit switches Optionally: angular scale Hardened worm gear drive Precise, smooth continuous 90° motion Together with WT-120 one centre of rotation
	Goniometer WT-100 Uni-directional repeatability down to ± 8.72E-5° Maximum speed 15 °/sec Load capacity up to 2 kg Integrated limit switches Optionally: angular scale Clear aperture 60 x 25 mm Precise, smooth continuous 10° motion
	Goniometer WT-85 Uni-directional repeatability down to ± 0.0001208° Maximum speed 15 °/sec Load capacity up to 2 kg Integrated limit switches Optionally: angular scale Clear aperture 30 mm Precise, smooth continuous 10° motion Together with WT-100 one centre of rotation
	Tip-Tilt Stage TT-65 tow axis tilt stages clear aperture flywheels supported without backlash Integrated limit switches

Filter Wheel AFW-65

Maximum speed 360°/sec.

Integrated reference switches

up to 6 filters

Clear aperture 25 mm