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ProductspfadVACUUM & CRYOpfadStagespfadPrecision Linear Stage PLS-85 Vacuum
<< backwards Precision Linear Stage PLS-85  Vacuum forwards >>

navDESCRIPTIOn
The PLS-85 linear stages are especially suited for high precision applications with limited space while allowing loads of up to 6 [7] kg. Cross-roller bearings guarantee a very high guidance stiffness. learn more...
Driven by a precision re-circulating ball screw with 1 mm pitch options, the PLS-85 can be mounted in any orientation. For more demanding positioning tasks, the PLS-85 linear stages can be supplied with a side-mounted linear scale.
Drawing on the extensive experience of PI miCos GmbH in the field of precision positioning in both vacuum and cryogenic environments, the PLS-85 is available configured for either HV or UHV operation.
Special attention is paid to material choice, preparation, finish and selection of lubrication materials for moving parts. The basic stage is enhanced by detail design changes to minimise and where possible remove the potential for trapped volumes. Wiring is reconfigured with appropriate insulation materials and the highest quality vacuum prepared stepper motors are selected. Optional UHV compatible limit switches are available. Final test of the stages are carried out in the PI miCos GmbH vacuum facility. Bake-out and out-gassing specifications are available on request. [*] = HV / High Vacuum
 
navDefinitions
Fine Vaccum Fine Vaccum
  High Vacuum High Vacuum
  Ultra-High Vacuum Ultra-High Vacuum
  Linear Feedback Vacuum Linear Feedback Vacuum
 
UHV Reference Model - Precision Linear Stage PLS-85 Vacuum Load Symbol
navKey features UHV [hv]
 navTravel range up to 155 mm (6")
 navUni-directional repeatability down to 0.05 µm
 navMaximum speed 8 [15] mm/sec, 4 mm/sec [UHV - no lubrication]
 navLoad capacity up to 6 [7] kg
 navLimit & Reference switches in ceramic-gold [plasitc]
 navOptionally Optical Linear Encoder vacuum type
 navAccessories D-type Connectors & Feedthroughs
 

 

  • High Vacuum datasheet
    Reference Model

  • Ultra High Vacuum datasheet
    Reference Model

  • Vacuum Accessories

High Vacuum datasheet
navclassification of the vacuum classes*
Low vacuum FV -20°C ... +150°C      <1 - 1x 10-3 mbar
High vacuum HV -20°C ... +210°C <1x 10-3 - 1x 10-7 mbar
Ultra-high vacuum UHV -20°C ... +210°C <1x 10-7 - 1x 10-9 mbar
Ultra-high vacuum Grease UHV-G -20°C ... +210°C < 10-9 mbar
Ultra-high vacuum Cryo UHV-C -269°C ... +40°C           up to 10-11 mbar
Extreme-ultra-high vacuum E-UHV -20°C ... +210°C <1x 10-9 - 1x 10-11 mbar
* the values refer to the vacuum motors ready to use
classification of the vacuum classes gerneral terms
 
navFacts
Load
Characteristics
 Fx
(N)		 Fy
(N)		 Fz
(N)		 Mx
(Nm)		 My
(Nm)		 Mz
(Nm)		 kax
(µrad/Nm)		 kay
(µrad/Nm)
HV Motor 35 25 70 20 25 15 70 40
 
navTECHNICAL DATA
Travel range (mm)
 26 52 102 155
Straightness / Flatness (µm) ± 1 ± 2 ± 4 ± 6
Pitch (µrad) ± 60 ± 90 ± 120 ± 150
Yaw (µrad) ± 60 ± 80 ± 100 ± 120
Weight (kg) 0.9 1.2 1.5 1.8
 
Motor (Pitch 1 mm) HV Motor  
Linear scale   LS Encoder
Speed max. (mm/sec) 15  
Resolution calculated (µm) 5 (FS) 0.05
Resolution typical (µm) 0. 05 0.05
Bi-directional Repeatability (µm) ± 1 ± 0.1
Uni-directional Repeatability (µm) 0.1 0.05
Nominal Current (A) 1.2  
Voltage Range (V)    
Accuracy on request
Velocity Range (mm/sec) 0.001 ... 15
Material Aluminium, vacuum surface
navNote:
navMore info:
FS = full step, LS = Optical Linear Encoder
Detailed info, concerning the motors and encoders, see: Appendix...
Ultra High Vacuum datasheet
navclassification of the vacuum classes*
Low vacuum FV -20°C ... +150°C      <1 - 1x 10-3 mbar
High vacuum HV -20°C ... +210°C <1x 10-3 - 1x 10-7 mbar
Ultra-high vacuum UHV -20°C ... +210°C <1x 10-7 - 1x 10-9 mbar
Ultra-high vacuum Grease UHV-G -20°C ... +210°C < 10-9 mbar
Ultra-high vacuum Cryo UHV-C -269°C ... +40°C           up to 10-11 mbar
Extreme-ultra-high vacuum E-UHV -20°C ... +210°C <1x 10-9 - 1x 10-11 mbar
* the values refer to the vacuum motors ready to use
classification of the vacuum classes gerneral terms
 
navFacts
Load
Characteristics
 Fx
(N)		 Fy
(N)		 Fz
(N)		 Mx
(Nm)		 My
(Nm)		 Mz
(Nm)		 kax
(µrad/Nm)		 kay
(µrad/Nm)
UHV Motor 30 20 60 15 20 10 70 40
 
navTECHNICAL DATA
Travel range (mm)
 26 52 102 155
Straightness / Flatness (µm) ± 1 ± 2 ± 4 ± 6
Pitch (µrad) ± 60 ± 90 ± 120 ± 150
Yaw (µrad) ± 60 ± 80 ± 100 ± 120
Weight (kg) 0.9 1.2 1.5 1.8
 
Motor (Pitch 1 mm) UHV Motor  
Linear scale   LS Encoder
Speed max. (mm/sec) 8 (4)**  
Resolution calculated (µm) 5 (FS) 0.05
Resolution typical (µm) 0. 05 0.05
Bi-directional Repeatability (µm) ± 1 ± 0.1
Uni-directional Repeatability (µm) 0.1 0.05
Nominal Current (A) 1.2  
Voltage Range (V)    
Accuracy on request
Velocity Range (mm/sec) 0.001 ... 8 (4)**
Material Aluminium, vacuum surface
navNote:
navMore info:
FS = full step, LS = Optical Linear Encoder, (**) = no lubrication !
Detailed info, concerning the motors and encoders, see: Appendix...
Vacuum Accessories
navAccessories.  PI miCos can supply typical range off feedthroughs, ,crimp pins, crimp toolsand Kapton insulated wire. Internal vacuum compatible connectors are available intwo versions: ceramic for UHV and Special Low Vapour Polymer for high vacuum. DAccessories - D-type Feedthroughs & UHV/HV Connectors-type Feedthroughs are recommended for electrical measurement, signals, heaters up to amps as well as thermocouple connections. Internal and external connections have locking screws which are important for safety and ease of demountability. Particularly suited for the manufacturing of CE compliant equipment. The connectors and sockets are industry standards and can be used witha wide range of connectors available from electronic componentssuppliers.

Accessories - Vacuum Motors VSS SeriesnavPlease note: PI miCos supplies vacuum-prepared stages with test plugs first, which cannot be used in vacuum. The testplug has to be disconnected and replaced by a vacuum plug by the customer. Vacuum feedthrogh, plugs and other vacuum accessories can optionally be obtained from PI miCos.
 
navSchematic diagram navElectrical feedthrough   fig.1
 
Vacuum compatible
connector and cable
navCapton wire ...................................... UHV / HV
navCeramic *connector ....................... UHV
navPolymer *connector ........................ HV
navGold *pins ........................................ UHV
navSteel *pins ........................................ HV
* = female
 
D-type feedthrough
navCF-flange DN .................................... Standard
navKF-flange ........................................... On request
navISO-K flange ...................................... On request
 
Atmospheric compatible connector and cable
navStandard *connector ....................... AIR
navHausing, metalliesed ..................... AIR
navHausing, metal on request ............ AIR
navStandard cable ................................ AIR
* = female
Owerview - Feedthrough & Accessories
 
navD-type Connectors navCeramic Version for UHV   fig.2
navMaterials UHV: SS, Glass-Ceramic
navMaterials HV: SS, Glass filled polymer
navRoHS complimant: YES
navGenter: Female - Crimp
navMax. Bake Temperature: 250° C
navMax. Operating Temperature: 250° C
navMin. Operating Temperature: -320° C
navMax. Vacuum Level 1x 10-12 mbar
navMax. Current Rating 1 Amp. per Pin

Accessories - D-type Feedthroughs & UHV Connectors Glass-Ceramic 9pins female
 
navD-type Feedthrough navDN 40 CF & 1x15 pin D-type   fig.3
navMaterials: SS, Glass-Ceramic
navRoHS complimant: YES
navGenter: Male - Male
navMax. Bake Temperature: 250° C
navMax. Operating Temperature: 250° C
navMin. Operating Temperature: -320° C
navMax. Vacuum Level 1x 10-12 mbar
navMax. Current Rating 1 Amp. per pin
 Example - Feedthrough
 
navVacuum Motors navVacuum Motors VSS Serie   fig.4
nav2 Phase Stepper motors for vacuum applications
navVacuum classes: FV, HV and UHV
navTemperature range from –20 to +300 °C
navRadiation resistance up to 106 J/kg
navHolding torques from 3.4 mNm to 9.9 mNm
navFull steps per rotation: 500, 200, 72
navOption: Gear, coupling, 2nd shaft, temp sensor
navOption: Clean room compatible

Accessories - Vacuum Motors
 

  • MOTOR SIZE


  • DRAWING INFO


  • ORDERING INFO & DETAILS ON REQUEST

 
HV Motor UHV Motor
drawing info
         
Travel range (mm) 26 52 102 155
A (mm) 59 68.5 93.5 128
B (mm) 119.5 138.5 188.5 257.5
C (mm) - 100 150 200
 
drawing info
Please fill in all fields marked with * 
Order no. * 6234-V-

  order order    
High Vacuum - HV 1x10-7 mbar
High Vacuum Motor with 2x plastic limit switch Motor with
Telflon / Kapton wire lenght L=2.0m with Testplug, please change
Lubrication with Ultratherm 2000		 7        
Ultra High Vacuum - UHV-G 1x10-9 mbar
Ultra Vacuum Motor with 2x ceramic-gold-stainless limit switches
Motor- and limit switch with
Kapton wire lenght L=2.0m with Testplug, please change
Lubrication with Ultratherm 2000 & Temperature Sensors		 8        

No Lubrication - Ultra High Vacuum - UHV 1x10-9 mbar
Ultra Vacuum Motor with 2x ceramic-gold-stainless limit switches
Motor- and limit switch with
Kapton wire lenght L=2.0m with Testplug, please change
& Temperature Sensors
No Lubrication Remar < Lifetime and Speed

 9        
Travel range 26 mm (1")   0      
52 mm (2")   1      
102 mm (4")   2      
155 mm (6")   3      
Options
 without LS Encoder Open Loop     0    
LS Encoder Vacuum suitable     1    
Further Options
Accessories
Performance		 Teflon / Kapton
D-type Connector Standard version
D-type Feedthrough On request
Bake-out procedures On request
Out-gassing specifications On request
The testplug has to be disconnected and replaced by a vacuum plug by the customer.
Otherwise, please select suitable 15 pin D-type vacuum plug do you looking for.
Request
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